SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System
This guideline was technically approved by the Global Facilities Committee and is the direct responsibility of the Japan Facilities Committee. Current edition approved by the Japan Regional Standards Committee on July 19, 2002. Initially available at www.semi.org September 2002; to be published November 2002.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
The purpose of this document is to provide a standardized methodology and procedure for the leakage performance of gas delivery systems temperature cycling.
This test method applies to gas delivery systems installed in semiconductor manufacturing equipment.
Referenced SEMI Standards
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping System and Components