SEMI F72 - Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in February 2014; originally published November 2002; previously published March 2009.
The purpose of this Document is to define a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system. This Test Method is intended to be applied to the wetted surfaces of stainless steel tubing, fittings, valves, and other components as a measure of the effectiveness of passivation.
This Document defines a method of testing the wetted surfaces of stainless steel tubing, fittings, valves, and other components to determine the surface and near-surface composition as a measure of the effectiveness of passivation processes.
The objective of this method is to describe a general set of instrument parameters and conditions that will achieve reproducible measurements within the chromium-enriched passive oxide layer.
This Document describes a test method to characterize the composition and thickness of the chromium-enriched oxide layer of stainless steel surfaces and to detect surface contamination in tubing, fittings, valves and other components. The procedure involves detection and measurement of the surface elemental composition by Auger electron spectroscopy (AES). This procedure also describes the test method for a depth compositional profile of Cr, Fe, Ni, O, and C from the as-received surface, through the oxide layers, and extending into the base metal. This measurement provides oxide thickness and chromium enrichment information throughout the passivated region.
Referenced SEMI Standards
SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
SEMI F60 — Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components