SEMI F73 - Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25, 2014. Available at www.semiviews.org and www.semi.org in December 2014; originally published November 2002; previously published March 2009.
This Document defines a uniform procedure for testing the wetted surfaces of stainless steel components intended for installation into high purity gas distribution systems. This procedure characterizes the occurrence, frequency, and in some cases the identity of microscopic surface defects and contaminants that may appear on the wetted surfaces. It should be noted that there has been no direct correlation made between the results of this test method and contamination of process gases or product yields in processes served by high purity gas distribution systems. Application of this test method is intended to yield comparable and reproducible results among various users of this method for the purposes of qualification of components.
The objective of this method is to describe a general set of instrumental parameters and conditions that will achieve precise and reproducible measurements of important parameters regarding the surface condition.
This procedure applies to the wetted surfaces in stainless steel tubing, fittings, valves, and other components to determine the effectiveness of surface finishing and cleaning processes. The technique describes counting of surface defects including pits, inclusions, inclusion stringers, scratches, residual process marks, grain boundaries and contamination on the wetted surfaces. However, any surface damage produced during sample preparation is to be excluded from such assessment.
Referenced SEMI Standards