SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems

Volume(s): Facilities

Language: English

Type: Single Standards Download (.pdf)

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Abstract

This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. Originally published November 2002; previously published November 2003.

This document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface-mounted gas systems and conventional metal face seal fitting systems.

Referenced SEMI Standards

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components