F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems

SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems -

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Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI F74-1103 (Reapproved 0710) - Inactive

Revision

Abstract

 

This document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface-mounted gas systems and conventional metal face seal fitting systems.

　

Referenced SEMI Standards
 

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies 
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
 

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