SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems
This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. Originally published November 2002; previously published November 2003.
This document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface-mounted gas systems and conventional metal face seal fitting systems.
Referenced SEMI Standards
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components