SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems
Volume(s):
Facilities
Language:
English
Type:
Single Standards Download (.pdf)
Abstract
This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. Originally published November 2002; previously published November 2003.
This document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface-mounted gas systems and conventional metal face seal fitting systems.
Referenced SEMI Standards
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
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