SEMI F76 - Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2018. Available at www.semiviews.org and www.semi.org in March 2018; originally published March 2003; previously published November 2010.
NOTICE: This Document was reapproved with minor editorial changes.
This is a test method to compare gas handling components for potential particle generation in corrosive gas service. It is intended as a practical means of generating performance data for a group of components to be compared in a selection process.
This Test Method applies to valves, particle filters, and low pressure regulators.
Referenced SEMI Standards
SEMI C59 — Specification for Nitrogen
SEMI E66 — Test Method for Determining Particle Contribution by Mass Flow Controllers
SEMI F43 — Test Method for Determination of Particle Contribution by Point-of-use Gas Purifiers and Gas Filters