SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at and in September 2014; originally published July 2003; previously published July 2010.


The purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions.


The information and conclusions provided are taken from published literature. References are cited. Recommendations are made based on the cited literature, although no opinion is made as to the validity of the cited literature.


The suggestions are specific to high purity silicon, single or poly crystal, covered by native oxide.


Referenced SEMI Standards

SEMI AUX030 — Codes for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers

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