SEMI F80 - Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System
This Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 17, 2014. Available at www.semiviews.org and www.semi.org in September 2014; originally published November 2003; previously published March 2009.
This Document is a guide to a test method to determine gas change/purge efficiency of gas delivery system.
It covers both conventional metal face sealing and surface mount gas delivery systems.
This Test Method applies to all type of high purity gas delivery systems used in semiconductor manufacturing facilities and comparable research and development areas.
Referenced SEMI Standards