SEMI F81 - Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in September 2017; originally published November 2003; previously published June 2011.
The purpose of this Specification is to provide visual inspection and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. These criteria are meant to ensure that welds are of sufficient quality to provide the required system purity, weld integrity, and weld strength for use in semiconductor manufacturing applications.
This Specification defines inspection and acceptance criteria for GTA autogenous butt joint welds of stainless steel and other CRAs in fluid distribution systems. The fluid distribution system includes tubing, pipe, fittings, valves, subassemblies and components that contain and distribute fluid.
Referenced SEMI Standards
SEMI F78 — Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications