SEMI F86 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems -

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Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI F86-1012 - Inactive

Revision

Abstract

 

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

1  Purpose
1.1  This Standard establishes the properties and physical dimensions of two port components for 1.125 inch type surface mount gas distribution system.
2  Scope
2.1  This Standard includes common requirements, layout, size, detailed specifications, and dimensions of the components.
2.2  This Standard applies to two-port/four-fastener components (except mass flow controllers and mass flow meters). The components (i.e., valves, pressure regulators, pressure transducers, filters and purifiers) are mounted on substrates with fasteners accessible from the top.
2.3  This Standard only applies to components for systems, which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44.7 psia). This Standard also only applies to components with operating pressures less than 344 kPa (500 psia) at 20°C.

 

Referenced SEMI Standards (purchase separately)
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications

 

Revision History
SEMI F86-1012 (technical revision)
SEMI F86-0312 (technical revision)
SEMI F86-0304 (first published)

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