F09600 - SEMI F96 - 液体CVD原料を入れるキャニスターのポート設定のための仕様

Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

免責事項: このSEMIスタンダードは,投票により作成された英語版が正式なものであり,日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます。



本仕様は,Global Gases Committeeで技術的に承認されたもので,North American Gases Committeeが直接責任を負うものである。現版は2004年4月22日North American Regional Standards Committeeにて承認されている。2004年6月にまずwww.semi.orgで入手可能になり,2004年7月発行に至る。


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.










Referenced SEMI Standards

SEMI F66 — Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals

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