SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors
This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on April 22, 2004. Initially available at www.semi.org June 2004; to be published July 2004.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This document specifies the type, size and spacing of connectors to be used on metal (e.g., stainless steel) canisters for liquid chemical precursors, solutions and solvents.
This document applies to metal (e.g., stainless steel) canisters to be used for "liquid precursors" (see definition) including solutions of precursors in solvents. It also applies to containers for solvents used for in situ cleaning of delivery system.
The liquid connection ports (inlet and outlet) are included, as are pneumatic connections to valves.
Parameters such as overall canister dimensions are expected to be specified by other standards.
Referenced SEMI Standards
SEMI F66 — Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals