SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube
This specification was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www.semi.org in June 2005.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This document specifies the outside dimensions of diaphragm valves used with metric tetrafluoroethylene perfluoroalkylvinylether (PFA) tubes in liquid chemical distribution facilities and process equipment for semiconductor and flat panel display manufacturing.
This specification addresses dimensions of diaphragm valves used with metric PFA tubes except for face-to-face dimensions. Since there are many seizes of fittings being applied to valves, this document doesn’t specify face-to-face dimensions.
These diaphragm valves are limited to pneumatic valves. Specification for manual valves should be separately provided as needed.
These diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display manufacturing.
The valves are made from materials such as tetrafluoroethylene (PTFE) or PFA, which have high corrosion resistance and low contamination contribution to the fluid.
The valves withstand up to 0.2 megapascals (MPa) [29 pounds per square inch (psi)] back pressure.
Referenced SEMI Standards
SEMI F65 — Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes