SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
This test method was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www.semi.org in June 2005.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This compliance test method presents that the verification of the compatibility of each diaphragm valves for metric perfluroalkoxy (PFA) tube simply.
This document specifies the relative orifice that gives the minimum flow coefficient for diaphragm valve for metric PFA tube.
This compliance test method describes how to verify the flow coefficient of the diaphragm valve by comparing with the relative orifice.
This Specification addresses a capacity of diaphragm valves used with metric PFA tubes.
These diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display manufacturing.
The valves are made from materials such as polytetrafluoroethylene (PTFE) or PFA, which have high corrosion resistance and low contamination contribution to the fluid.
The valves withstand up to 0.2 megapascals (MPa) [29 pounds per square inch (psi)] backpressure.
Fully open to fully shut switch over is the objective of the shut-off valve.
Referenced SEMI Standards
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