F10100 - SEMI F101 - Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17, 2018. Available at www.semiviews.org and www.semi.org in October 2018; originally published November 2005; previously published October 2017.


The purpose of this Document is to define a method for testing pressure regulators being considered for installation into gas systems. Application of this Test Method is expected to yield comparable data among regulators tested for qualification purposes.


This Document establishes a test method for quantifying regulator performance characteristics.


This Test Method applies to pressure regulators. The test procedures that measure these characteristics are intended to be performed sequentially, in the order given below. This Document specifies test methods, which will allow the regulator manufacturer or user to determine regulator performance for the following characteristics:

• Particle Count

• Leakage

• Creep/Lockup

• Supply Pressure Effect

• Resolution

• Pressure vs. Flow Curve, Hysteresis Curve, and Operating Hysteresis Value

• Repeatability

• Set pressure Stability

• Step Function Transient Response

• Resonance

• Flow Coefficient

• Excess Pressure

• Endurance


This Test Method provides a common basis for communication between manufacturers and users.


Referenced SEMI Standards

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F32 — Test Method for Determination of Flow Coefficient in High Purity Shutoff Valves

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