SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This document specifies the maximum outer diameter, maximum height and nominal volume of canisters. The canister, made of stainless steel, which is designed to contain liquid chemicals, is used as a bubbler in process equipment or a container for liquid chemical distribution system in semiconductor/flat panel display manufacturing.
This document applies to the cylindrical canisters made of stainless steel that have a flat bottom or a skirt shaped bottom in order to be stable.
The nominal volume of the canister which is over 40 liters is exempted from the scope.
Referenced SEMI Standards