F10500 - SEMI F105 - Guide for Metallic Material Compatibility in Gas Distribution Systems

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at www.semiviews.org and www.semi.org in September 2014; originally published November 2007; previously published March 2014.


The purpose of this Guide is to document the industry acceptable compatibility of metallic materials with semiconductor process gases.


This Guide is applicable to metallic materials that are exposed to process gases within the gas distribution systems of semiconductor manufacturing equipment. It is not applicable to high pressure, bulk delivery systems.


This Guide is specific to High Purity and Ultra-High Purity chemical delivery systems.


Referenced SEMI Standards

SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications

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