SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16, 2009. Available at www.semi.org in February 2010.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Document provides a guide for manufacturers of liquid chemical equipment as well as piping system installers where integration of polymer components is to consider minimization of installation space.
This Document is also expected to advance installation practices of polymer components used in liquid chemical equipment distribution system within device and process device for semiconductor, flat panel display and solar cell manufacturing.
This Guide applies to polymer components such as valves, regulators and filters which convey and control the liquid chemicals in the piping system.
These components and piping systems are constructed of materials such as PTFE, PFA, PVDF, PVC and PP, etc., which have high corrosion resistance properties and low fluid contamination properties.
Referenced SEMI Standards
SEMI F57-0301 — Provisional Specification for Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
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