SEMI F113 - Test Method for Pressure Transducers Used in Gas Delivery Systems
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17, 2016. Available at www.semiviews.org and www.semi.org in November 2016.
The purpose of this Document is to outline the test method for electronic pressure transducers used in gas delivery systems for semiconductor processing.
This Document describes the procedures for testing the leak integrity, warm up time, voltage sensitivity, inaccuracy, linearity, repeatability, hysteresis, reproducibility, thermal coefficient, drift, accelerated life cycle, and proof pressure of pressure transducers with a full pressure range of 2757.9 KPa (400 psia) or less in gas delivery systems.
Referenced SEMI Standards
SEMI C59 — Specifications and Guidelines for Nitrogen
SEMI E27 — Guide for Mass Flow Controller and Mass Flow Meter Linearity
SEMI E28 — Guide for Pressure Specifications of the Mass Flow Controller
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI E56 — Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers
SEMI E89 — Guide for Measurement System Analysis (MSA)
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F62 — Test Method for Determining Mass Flow Controller Performance Characteristics from Ambient and Gas Temperature Effects