SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse
This Guide provides definitions and recommendations for design of drain segregation to enable water reuse in a semiconductor manufacturing facility. It is intended to establish a common basis for developing design specifications and decisions concerning planning and design of water reuse systems. This Guide also includes implications for the water reclamation and reuse systems configurations.
This Guide is recommended to be used by semiconductor factory engineers and suppliers for developing tool-specific and site-specific design and construction documents used for the tool install activities and segregation decisions.
This Guide applies to drain and collection systems for the semiconductor manufacturing tools, supplying water to a variety of reuse applications. Such applications may include point of use (POU) recycling, directing secondary use water to the front end of an ultrapure water (UPW) system, cooling systems, scrubbers, POU abatement, thermal processes, as well as to irrigation. Choice of the reuse scheme depends on the quality of the water, application requirements, and applicable environmental regulations.
The scope of this Guide includes systems, assemblies, and components of the manufacturing tools and related infrastructure that are involved in segregation and treatment of the streams suitable for reuse. Given a broad range of reclaim water qualities and applications, the treatment portion of the scope is limited to the conceptual definitions only and does not include specific treatment processes.
The scope of this Guide is to provide recommendations in the context of possible water reuse segregation strategies.
Referenced SEMI Standards (purchase separately)
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing
SEMI F98 — Guide for Water Reuse in Semiconductor Industry
SEMI F104 — Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI F116-0821 (first published)
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