F11900 - SEMI F119 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution
The purpose of this Test Method is to determine the
relative resistance to pitting corrosion of the wetted surfaces of components
intended for use in corrosive gas distribution systems for semiconductor
manufacturing. This Test Method is an adaptation of ASTM G48 and is intended to
differentiate between stainless steels of differing compositions or processing
that may affect the corrosion performance of the wetted surfaces. Detailed
information on the method is found in
This Test Method describes a procedure which may be used to rank the pitting corrosion resistance of wetted surfaces of tubing or components of finished surfaces intended for use in corrosive gas systems. Pitting corrosion is a potential corrosion failure mechanism in semiconductor gas delivery systems, particularly in welded components or tubing exposed to corrosive gases with moisture present.
This Test Method is an adaptation of
This Test Method is reproducible and provides a metric (i.e., critical pitting temperature) in addition to a qualitative (i.e., visual) evaluation of corrosion resistance.
Referenced SEMI Standards (purchase separately)
SEMI F119-1121 (first published – replaces SEMI C91)
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