SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water -

Abstract

1  Purpose
1.1  This Guide describes criteria for materials and components in direct contact with ultrapure water (UPW) in systems used supporting semiconductor manufacturing.
1.2  In addition, this Guide establishes a common basis for developing detailed guidelines for future raw materials and components with the intention that these guidelines align with the IEEE IRDS Yield Enhancement Section, Yield Table YE3.
2  Scope
2.1  This Guide provides purity criteria of components used in the manufacture and conveyance of UPW in semiconductor manufacturing facilities and the polymer materials used to make those components.
2.2  Where appropriate, testing and validation approaches are defined to ensure polymer materials and components meet the intent of this Guide.
2.3  This Guide is applicable to the entire supply chain from raw materials to finished product.
NOTE 1: The contamination levels in Table 2 should be considered as they are included in the IRDS Yield Roadmap for UPW.
2.4  Quantitative and Qualitative Measures — Table 2 states limits for metallic, ionic, and total organic (oxidizable) carbon contributions. Particle precursors are discussed in detail in § 8.1 regarding what they are and why they are important.
2.5  This Guide pertains to polymer materials and components (including the items shown in Table 1) used to supply UPW and hot ultrapure water (HUPW) throughout the factory for use in wafer processing equipment. Polymer materials and components that meet the values specified in this Guide should be considered suitable for UPW and HUPW.
2.6  This Guide recommends limits and the tests for determining the rate of extractable contamination by polymer components. The components should be representative samples of the components the manufacturer provides to its customers.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)
SEMI C69 — Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI C79 — Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI F31 — Guide for Bulk Chemical Distribution Systems
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing
SEMI F57 — Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F61 — Guide to Design and Operation of a Semiconductor Ultrapure Water System
SEMI F104 — Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F121 — Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI F123-0426 (first published)

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