G00600 - SEMI G6 - Test Method for Seal Ring Flatness

Volume(s): Packaging
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0.330 in. × 0.330 in.


Referenced SEMI Standards (purchase separately)



Revision History

SEMI G6-89 (technical revision)

SEMI G6-84 (technical revision)

SEMI G6-83 (first published)

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00