SEMI G6 - Test Method for Seal Ring Flatness

Volume(s): Packaging
Language: English
Type: Single Standards Download (.pdf)
This specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0.330" × 0.330".


Referenced SEMI Standards


Member Price: $113.00
Regular price Non-Member Price: $150.00