SEMI G6 - Test Method for Seal Ring Flatness -
Abstract
NOTICE: This Standard or Safety Guideline has an Inactive
Status because the conditions to maintain Current Status have not been met.
Inactive Standards or Safety Guidelines are available from SEMI and continue to
be valid for use.
This Specification covers the method for determining the
maximum deviation between the seal ring and a reference plane defined by three
fixed points on the seal ring. This method will not work on parts smaller than
0.330 in. × 0.330 in.
Referenced SEMI Standards (purchase separately)
None.
Revision History
SEMI G6-89 (technical revision)
SEMI G6-84 (technical revision)
SEMI G6-83 (first published)
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