SEMI G52 - Test Method for Measurement of Ionic Contamination on Semiconductor Leadframes -
Abstract
Contamination on leadframes can contribute to semiconductor
device reliability problems. This Test Method may be used by lead frame
manufacturers at outgoing inspection and by users at incoming inspection.
Correlation of device reliability with contamination levels may lead to
improved leadframe cleaning processes.
This Standard describes the procedure to determine ionic
contamination on leadframes using a water extraction method. The method is
sensitive to Na+, NH4+, K+, Cl−, NO3-, Br−, SO42−, PO43−.
Referenced SEMI Standards
None
Revision History
SEMI G52-1120 (technical revision)
SEMI G52-1115 (technical revision)
SEMI G52-90 (Reapproved 1104)
SEMI G52-90 (first published)
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