G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials

Volume(s): Packaging
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Assembly & Packaging Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in March 2018; originally published September 1996; previously published August 2011.


NOTICE: This Document was reapproved with minor editorial changes.


This Test Method describes a procedure to measure particles on sheet materials.


The method described may be used for the measurement of particles on items such as:

• Leadframe Interleaves,

• Cleanroom Paper, and

• Packing Material.


The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection.


Referenced SEMI Standards


Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00