SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials
This Standard was technically approved by the Assembly & Packaging Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in March 2018; originally published September 1996; previously published August 2011.
NOTICE: This Document was reapproved with minor editorial changes.
This Test Method describes a procedure to measure particles on sheet materials.
The method described may be used for the measurement of particles on items such as:
• Leadframe Interleaves,
• Cleanroom Paper, and
• Packing Material.
The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection.
Referenced SEMI Standards