G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials

SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials -

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Volume(s): Packaging
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI G67-0996 (Reapproved 0318) - Inactive

Revision

Abstract

　

NOTICE: This Document was reapproved with minor editorial changes.

　

This Test Method describes a procedure to measure particles on sheet materials.

 

The method described may be used for the measurement of particles on items such as:

• Leadframe Interleaves,

• Cleanroom Paper, and

• Packing Material.

　

The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection.

 

　

Referenced SEMI Standards

None.

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