SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials

Volume(s): Packaging
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Assembly & Packaging Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at and in March 2018; originally published September 1996; previously published August 2011.


NOTICE: This Document was reapproved with minor editorial changes.


This Test Method describes a procedure to measure particles on sheet materials.


The method described may be used for the measurement of particles on items such as:

• Leadframe Interleaves,

• Cleanroom Paper, and

• Packing Material.


The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection.


Referenced SEMI Standards


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