SEMI G78 - Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements
This test method was technically approved by the global Automated Test Equipment Committee and is the direct responsibility of the North American Automated Test Equipment Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available at www.semi.org April 1999; to be published June 1999.
To define the terms and provide a means of comparative, or relative measurement for the automated wafer prober functions: Accuracy, Repeatability and Throughput.
Referenced SEMI Standards
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability and Maintainability (RAM)
SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment