SEMI G80 - Test Method for the Analysis of Overall Digital Timing Accuracy for Automated Test Equipment -
Abstract
NOTICE: This Standard or Safety Guideline has an Inactive
Status because the conditions to maintain Current Status have not been met.
Inactive Standards or Safety Guidelines are available from SEMI and continue to
be valid for use.
This procedure will define a standard process whereby any
logic integrated circuit (IC) automatic test equipment (ATE) system can be
evaluated for parameters that makeup an alternating current (AC) timing
accuracy specification.
Application of this procedure will simplify ATE
comparisons, reduce specification ambiguity, simplify user acceptance
procedures, simplify ATE performance monitoring, and provide a common
validation criteria for ATE suppliers.
This procedure is intended for analysis of timing accuracy
specifications for all semiconductor ATE capable of digital functional testing.
The extent of the analysis includes overall timing accuracy (OTA) and the
primary components of overall timing accuracy as defined in the definition
section of this Document.
Referenced SEMI Standards (purchase separately)
SEMI G79 –– Specification for Overall Digital Timing
Accuracy
Revision History
SEMI G80-0200 (Reapproved 0612)
SEMI G80-0200 (first published)
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