SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process -

Abstract

This Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated frame cassette transport systems, and/or to meet ergonomic requirements for manually loaded equipment.

This is a Standard covering equipment for 300 mm frame cassette only.

 

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

SEMI G77 — Specification for Frame Cassette for 300 mm Wafers

Revision History

SEMI G82-1115 (Reapproved 1220)

SEMI G82-1115 (technical revision)

SEMI G82-0301E (Reapproved 0706)

SEMI G82-0301E (editorial revision)

SEMI G82-0301 (first published)

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