SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process
This Standard was technically approved by the Assembly & Packaging Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2015. Available at www.semiviews.org and www.semi.org in November 2015; originally published March 2001; previously published July 2006.
This Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated frame cassette transport systems, and/or to meet ergonomic requirements for manually loaded equipment.
This is a Standard covering equipment for 300 mm frame cassette only.
Referenced SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI G77 — Specification for Frame Cassette for 300 mm Wafers
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