G08200 - SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process
This Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated frame cassette transport systems, and/or to meet ergonomic requirements for manually loaded equipment.
This is a Standard covering equipment for 300 mm frame cassette only.
Referenced SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI G77 — Specification for Frame Cassette for 300 mm Wafers
Revision History
SEMI G82-1115 (Reapproved 1220)
SEMI G82-1115 (technical revision)
SEMI G82-0301E (Reapproved 0706)
SEMI G82-0301E (editorial revision)
SEMI G82-0301 (first published)
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