SEMI G85 - Specification for Map Data Format
This specification was technically approved by the Global Automated Test Equipment Committee and is the direct responsibility of the North American Automated Test Equipment Committee. Current edition approved by the North American Regional Standards Committee on March 12, 2003 and April 11, 2003. Initially available at www.semi.org May 2003; to be published July 2003. Originally published November 2001; previously published March 2003.
This document describes in detail how the data items that relate to electronic mapping are to be represented in a file format.
Although the examples given in this document are for wafers, the map data format described can be applied to any substrate including, but not limited to, wafer, tray, strip or tape.
This document applies to format of map data items. This document does not address the transmission, file naming conventions, storage or archiving of maps.
The semantics of the map data items are not specified in this document.
Referenced SEMI Standards
SEMI G81 — Specification for Map Data Items