G08500 - SEMI G85 - Specification for Map Data Format
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Document describes in detail how the data items that relate to electronic mapping are to be represented in a file format.
Although the examples given in this Document are for wafers, the map data format described can be applied to any substrate including, but not limited to, wafer, tray, strip or tape.
This Document applies to format of map data items. This Document does not address the transmission, file naming conventions, storage or archiving of maps.
The semantics of the map data items are not specified in this Document.
Referenced SEMI Standards (purchase separately)
SEMI G81 — Specification for Map Data Items
SEMI G85-0703 (technical revision)
SEMI G85-0303 (technical revision)
SEMI G85-1101 (first published)
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