SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes -

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Volume(s): Packaging
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI G90-0811 (Reapproved 0823) - Current

Revision

Abstract

 

The purpose of this Standard is to standardize the specifications for 300 mm wafer coin-stack type shipping container used for test and packaging processes for wafers.

 

This Specification defines the dimensions of container (refer to ¶ 5.1.1) and requirements for securing the interface between container and processing equipment or wafer transportation equipment.

 

This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection.

 

This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container.

 

Referenced SEMI Standards (purchase separately)

SEMI G59 — Test Method for Measurement of Ionic Contamination on Leadframe Interleafing and the Contamination Transferred from the Interleafing to the Leadframes

 

Revision History

SEMI G90-0811 (Reapproved 0823)

SEMI G90-0811 (Reapproved 0318)

SEMI G90-0811 (first published)

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