SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes
This Standard was technically approved by the Assembly & Packaging Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in March 2018; originally published August 2011.
The purpose of this Document is to standardize the specifications for 300 mm wafer coin-stack type shipping container used for test and packaging processes for wafers.
This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
This Document specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection.
This Document specifies the electrical characteristics and requirements for hazardous substance for the material of container.
Referenced SEMI Standards
SEMI G59 — Test Method for Measurement of Ionic Contamination on Leadframe Interleafing and the Contamination Transferred from the Interleafing to the Leadframes