SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes -
Abstract
The purpose of this Standard is to standardize the specifications for 300 mm wafer coin-stack type shipping container used for test and packaging processes for wafers.
This Specification defines the dimensions of container (refer to ¶ 5.1.1) and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection.
This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container.
Referenced SEMI Standards (purchase separately)
SEMI G59 — Test Method for Measurement of Ionic Contamination on Leadframe Interleafing and the Contamination Transferred from the Interleafing to the Leadframes
Revision History
SEMI G90-0811 (Reapproved 0823)
SEMI G90-0811 (Reapproved 0318)
SEMI G90-0811 (first published)
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