SEMI G92 - Specification for Tape Frame Cassette for 450 mm Wafer

Volume(s): Packaging
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Assembly & Packaging Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 11, 2014. Available at www.semiviews.org and www.semi.org in March 2015; originally published April 2012; previously published August 2014.

 

The purpose of this Standard is to specify mechanical features for the 450 mm wafer tape frame cassette used between the wafer mounting process and the die-bonding process.

 

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces.

 

Only the mechanical interfaces for the tape frame cassette are specified. Materials kinds or cleanliness are not defined.

 

This Standard specifies both semi-automated (PGV) and automated (AGV or OHT) handling of the tape frame cassette for 450 mm wafer. It does not intend to address manual handling.

 

A 450 mm wafer frame cassette has the following components and optional components. Optional components are not required features for the 450 tape frame cassette (TFC). They can be added according to customers’ demands or manufacturing problems.

 

Top

  • Top cover (optional)
  • Automation flange (optional)

 

Interior

  • Frame supports for 13 or 25 tape frames
  • Tape frame restraint

 

Sides

  • Corresponds to the forklift handling
  • Presence sense area
  • Guide surface (both sides)

 

Rear

  • Rear cover (optional)
  • Label placement area (optional)
  • RFID tag volume (required only when RFID tag is used)

 

Bottom

  • Three features that mate with kinematic coupling pins
  • Seven frame cassette sensing pads
  • Tape frame release bar (optional)
  • Seating plane (4×)
  • Presence sense area
  • Seating guide surface (bottom/side corners)

 

Front

  • Presence sense area

 

Referenced SEMI Standards

SEMI G88 — Specification for Tape Frame for 450 mm Wafer
SEMI G95 — Mechanical Interface Specification for 450 mm Load Port for Tape Frame Cassettes in Backend Process

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