SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer -

Abstract

This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.

This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection.

This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container.

The maximum number of tape frame wafers of both metal (SEMI G74) and plastic (SEMI G87) stored in the container shall be 13.

Referenced SEMI Standards (purchase separately)
SEMI G74 — Specification for Tape Frame for 300 mm Wafers
SEMI G87 — Specification for Plastic Tape Frame for 300 mm Wafer

Revision History
SEMI G94-0113 (Reapproved 1123)
SEMI G94-0113 (Reapproved 1118)
SEMI G94-0113 (first published)

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