G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様

Volume(s): Packaging
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,Assembly & Packaging Global Technical Committeeで技術的に承認されている。現版は201364日,global Audits and Reviews Subcommitteeにて発行が承認された。20136月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。










Referenced SEMI Standards

SEMI G88 — Specification for Tape Frame for 450 mm Wafer
SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer

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