SEMI G95 - Mechanical Interface Specification for 450 mm Load Port for Tape Frame Cassettes in the Backend Process
This Standard was technically approved by the Assembly & Packaging Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in March 2014; originally published June 2013.
This Standard is to define the mechanical interface of a load port in semiconductor manufacturing equipment, where the 450 mm tape frame cassette (450 TFC) can be loaded and unloaded. By this definition, it enables interoperability of load ports and carriers and it aims to promote the automation using 450 TFC.
The interface specification of this Standard is driven by and intended to mate with a carrier compliant to the 450 mm tape frame cassette (450 TFC) and it applies to 450 TFC.
This Standard is intended to specify only the mechanical interface between 450 TFC and the load port.
Loading and unloading of 450 TFC is assumed to be done by semi-automated (PGV) or automated (AGV or OHT) handling.
Referenced SEMI Standards
SEMI G88 — Specification for Tape Frame for 450 mm Wafer
SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer