SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port
This Standard was technically approved by the HB-LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in October 2016; originally published November 2013.
The purpose of this Document is to define the basic interface dimensions of a load port and their arrangements on HB-LED manufacturing equipment, where HB-LED 150 mm cassettes can be loaded and unloaded. This Document defines a set of requirements and features to enable interoperability of load ports and carriers without limiting innovative solutions.
The interface specification in this Document intended to mate with a cassette compliant to the relevant SEMI HB-LED 150 mm cassette Standard.
Loading and unloading is assumed to take place in manual and semi-automated mode by using any kind of system or device (e.g., Human Operators or Person Guided Vehicle).
This Specification considers the ergonomic requirements of manual cassette loading as outlined in SEMI S8 and provides volume for cassette rotation devices.
Referenced SEMI Standards
SEMI E63 — Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI E144 — Specification for RF Air Interface between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment
SEMI HB2 — Specification for 150 mm Open Plastic and Metal Wafer Cassettes Intended for Use for Manufacturing HB-LED
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment