SEMI HB8 - Test Method for Determining Orientation of a Sapphire Single Crystal -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

The purpose of this Standard is to standardize a test method for sapphire single crystal orientation measurement which includes sapphire cylinder, sapphire ingot, sapphire wafer, etc. It will improve the standardization of sapphire single crystal process from coring sapphire ingot, rolling cylindrical ingot to cutting wafer and provide solutions to improve sapphire products as well. Similar processes are defined in ASTM E82.

The test method of this Specification is X-ray diffraction orientation.

This Test Method is applied to determine the crystallographic orientation of a surface which is substantially parallel to the low index planes for sapphire single crystal materials.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI HB8-0217 (first published)

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