SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS)
As the high brightness light emitting diode (HB-LED) and patterned sapphire substrate (PSS) industry is under rapid development, it is very necessary to establish the standard for PSS products, which can provide a clear and common basis to meet the demands of research and development, production and sale for light emitting diode (LED) industry. Because the PSS industry belongs to the upstream in the whole LED industry, a sound standard and specification system is beneficial to the downstream of LED industry. This Standard intends to specify the terms, definitions and the specifications of pattern parameters (such as height, width and pitch, etc.,) for dry-etched patterned sapphire substrates.
Terms, definitions and specifications of pattern parameters will be specified for dry-etched patterned sapphire substrates.
This Standard applies to patterned sapphire substrates for semiconductor GaN epitaxial light-emitting diodes production.
Referenced SEMI Standards