SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface -

Abstract

The purpose of this Standard is to provide a supplement for the equipment automation interface for communication and control of process, automation and metrology equipment used in HB-LED manufacturing. It intends to define the data collection for tracking wafer activity when using a susceptor or a wafer carrier.

 

This Standard serves as a reference for both HB-LED manufacturers and equipment suppliers.

 

The document details properties and functions of variables related to susceptors and wafers which are used in the HB-LED manufacturing process on the basis of SEMI HB4. It also references a collection of SEMI and other standards and should give guidance on how to apply them in the HB-LED manufacturing environment in order to establish a reliable and extensible communication framework for the IT integration of equipment.

This Specification for HB-LED equipment communication interface applies to all HB-LED manufacturing equipment including process, automation and metrology systems used in production. However, it is not limited to these areas of application.

 

This Specification defines requirements for the communication interface used to integrate equipment within factory automation systems.

 

This Specification defines physical requirements for the susceptor and wafer.

 

This Specification can be applied to single wafer equipment as well as batch equipment.

 

This Standard shall define and formalize the requirements of LED susceptor and wafer in communication software (SECS/GEM).

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI HB4 — Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)

 

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