SEMI HB14 - Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Substrate -
Because there are various requirements and measurement methods for patterned sapphire substrate (PSS) in the LED industry, a standardized measurement method of PSS needs to be established so that customers and PSS suppliers can work together smoothly.
It is necessary to establish a standardized measurement method of PSS so that PSS suppliers will be able to provide clear and consistent product information to customers.
Provides a measurement method for the size, height, pitch, sidewall angle, of selected point on patterned sapphire substrates.
Provides a measurement method for the reflectivity of entire surface on patterned sapphire substrate.
Geometric PSS pattern measurements are limited to individual pattern and pattern array characteristic condition measurements.
Referenced SEMI Standards (Purchase separately)
SEMI HB1 — Specification for Sapphire Wafers Intended for Use for Manufacturing High Brightness-Light Emitting Diode Devices
SEMI HB14-0223 (first published)
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HB01400 - SEMI HB14 - Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Substrate
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