M00600 - SEMI M6 - 太陽光電池用シリコンウェーハの仕様

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Silicon Wafer Committeeで技術的に承認されている。現版は2008829日,global Audits and Reviews Subcommitteeにて発行が承認された。200810月にwww.semi.orgで,そして200811月にCD-ROMで入手可能となる。初版は1981年発行,前版は20077月に発行された。


注意: 本文書は前版のSEMI M6SEMI M6.1SEMI M6.2SEMI M6.3SEMI M6.4SEMI M6.5を全面改訂したものである。




Referenced SEMI Standards

SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers
SEMI M59 — Terminology for Silicon Technology
SEMI MF26 — Test Methods for Determining the Orientation of a Semiconductive Single Crystal

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