SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers -

Abstract

This Specification covers dimensional and crystallographic properties of monocrystalline virgin silicon test wafers together with selected electrical and surface defect characteristics.
 

This Specification covers virgin test wafers in all standard wafer diameters from 2 inch to 300 mm. It classifies test wafers according to the items specified. It provides three classes of smaller diameter test wafers (through 125 mm), and two classes of larger diameter test wafers (from 150 mm).
 

This Specification does not cover test wafers intended for applications placing higher demands on silicon wafers, such as particle counting, measuring resolution in a photolithography process, or monitoring metallic contamination; for wafers to be used in these applications, the user should reference SEMI M24.
 

For reference purposes, U.S. customary units shall be used for wafers of 2- and 3-inch nominal diameter and System International (SI), commonly called metric units, for 100 mm and larger diameter wafers.

Referenced SEMI Standards (purchase separately)
SEMI M1 — Specification for Polished Single Crystal Silicon Wafers
SEMI M24 — Specification for Polished Monocrystalline Silicon Premium Wafers
SEMI M45 —Specification for 300 mm Wafer Shipping System
SEMI M59 — Terminology for Silicon Technology
SEMI T3 — Specification for Wafer Box Labels

Revision History
SEMI M8-0312 (Reapproved 1023)
SEMI M8-0312 (Reapproved 0718)
SEMI M8-0312 (technical revision)
SEMI M8-0307 (technical revision)
SEMI M8-0306 (complete rewrite)
SEMI M8-0703 (technical revision)
SEMI M8-0301 (technical revision)
SEMI M8-0999 (technical revision)
SEMI M8-1296 (technical revision)
SEMI M8-93 (technical revision)
SEMI M8-84 (first published)

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