M01300 - SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers

Volume(s): Materials / Traceability
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Traceability Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in March 2018; originally published in 1998; previously published October 2011.

 

This Specification describes an alphanumeric marking system for silicon wafers. The marking code includes information on the origin, approximate resistivity, dopant species, and crystal growth orientation in addition to a wafer identification number. Use of this Specification ensures the consistency of all wafer marking performed by silicon manufacturers. This consistency allows simplification of the performance requirements of automatic Optical Character Reading (OCR) equipment.

 

By defining the basic code used to characterize the individual wafer, this Specification provides the information needed for practical operator interpretation.

 

This Specification defines the character set, location, and associated dimensions and tolerances of an alphanumeric code, specifically for identification of flatted and notched silicon wafers.

 

This Specification does not address the marking techniques that may be employed when complying with this Standard.

 

Referenced SEMI Standards

None.

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