SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals
Volume(s):
Materials
Language:
English
Type:
Single Standards Download (.pdf)
Abstract
The purpose of this document is to present a process for ion implantation, activation, and measurement of the resulting layers so that meaningful comparisons can be made between various lots of semi-insulating GaAs. This test will be performed by the supplier so that product may be represented in a standard way.
Referenced SEMI Standards
None.
Member Price:
$113.00
Regular price
Non-Member Price:
$150.00