M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表

SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 -

Member Price: $164.00
Non-Member Price: $215.00

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI M15-0298 - Inactive

Revision

Abstract

この資料は，鏡面半絶縁ガリウム砒素（GaAs）ウェーハの欠陥をタイプ別にその許容できる最大数を規定している。

　

Referenced SEMI Standards

None.

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