SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)
Abstract

この資料は,鏡面半絶縁ガリウム砒素(GaAs)ウェーハの欠陥をタイプ別にその許容できる最大数を規定している。

 

Referenced SEMI Standards

None.

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