SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers -
Abstract
This document defines the maximum number of defects, by type, that an acceptable polished Semi-Insulating Gallium Arsenide (GaAs) wafer may exhibit.Referenced SEMI Standards
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M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers
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