SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers
Volume(s):
Materials
Language:
English
Type:
Single Standards Download (.pdf)
Abstract
This document defines the maximum number of defects, by type, that an acceptable polished Semi-Insulating Gallium Arsenide (GaAs) wafer may exhibit.
Referenced SEMI Standards
None.
Member Price:
$113.00
Regular price
Non-Member Price:
$150.00