SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers -

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Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI M15-0298 - Inactive



This document defines the maximum number of defects, by type, that an acceptable polished Semi-Insulating Gallium Arsenide (GaAs) wafer may exhibit.


Referenced SEMI Standards


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