SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers
Volume(s):
Materials
Language:
English
Type:
Single Standards Download (.pdf)
Abstract
This document defines the maximum number of defects, by type, that an acceptable polished Semi-Insulating Gallium Arsenide (GaAs) wafer may exhibit.
Referenced SEMI Standards
None.
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