M01600 - SEMI M16 - 多結晶シリコンの仕様

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

本仕様は,global Silicon Wafer Committeeで技術的に承認されている。現版は,2010827 global Audits & Reviews Subcommitteeにて発行が承認された。201010月にwww.semi.orgで入手可能となる。初版は1989年発行,前版は200311月発行。




Referenced SEMI Standards

SEMI M59 — Terminology for Silicon Technology
SEMI MF1708 — Practice for Evaluation of Granular Polysilicon by Melter-Zoner Spectroscopies
SEMI MF1723 — Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy
SEMI MF1724 — Test Method for Measuring Surface Metal Contamination of Polycrystalline Silicon by Acid Extraction-Atomic Absorption Spectroscopy

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