This format provides a standard form for specifying several classifications of silicon wafers, as follows: Polished Silicon Wafers; Epitaxial Silicon Wafers; Epitaxial Silicon Wafers with Buried Layer; Annealed Silicon Wafer, and SOI Wafers for CMOS Applications. This format also lists the Electronic Data Interchange (EDI) codes used in SEMI T6 to identify the type of data being reported in the EDI message. The form is designed to be used in conjunction with other SEMI specifications where details of the dimensional, physical, electrical, and chemical properties are defined or specified. However, the form includes many items that are not currently included in the SEMI specifications. Also, many items are not now commonly specified, but may find increased importance in the future. The intention is to provide for flexibility and expansion of the technology. This format provides for specifying and ordering silicon wafers with varying levels of complexity. The minimum level of completeness is shown in each case, with additional options included to allow for customization of the wafer to the specific processing requirements of the user. If a particular item is not of interest, no entry is required. The only required entries are those marked as such for the purpose of minimal specification (diameter, orientation, dopant, resistivity, etc.). Values for many items are listed either in the polished silicon wafer standards in SEMI M1 or in the defect limits tables in SEMI M1, SEMI M2, or SEMI M11. If these standard specifications are sufficient for defining the wafers, only a single entry is required in each section of the form. This format also lists the codes required by SEMI T6 to identify the parameter being reported in the EDI message. Where necessary, secondary characteristics or identifier codes are listed within a generalized characteristic. For referee purposes, U.S. Customary units shall be used for wafers of 2- and 3-inch diameters, and SI (System International, commonly called metric) units for 100 mm and larger diameter wafers. This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Referenced SEMI Standards
SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers SEMI M2 — Specifications for Silicon Epitaxial Wafers for Discrete Device Applications SEMI M11 — Specifications for Silicon Epitaxial Wafers for Integrated Circuit (IC) Applications