M02100 - SEMI M21 - カーテシアン(デカルト)アレイにおける方形エレメントへの割当アドレスのガイド

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

ガイドは,global Silicon Wafer Committeeで技術的に承認されている。現版は,2010827 global Audits & Reviews Subcommitteeにて発行が承認された。201010月にwww.semi.orgで入手可能となる。初版は1992年発行,前版は20043月発行。








Referenced SEMI Standards

SEMI M1 — Specifications for Polished Single Crystal Silicon Wafers
SEMI M17 — Guide for a Universal Wafer Grid
SEMI M20 — Practice for Establishing a Wafer Coordinate System
SEMI M59 — Terminology of Silicon Technology

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