M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers

SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers -

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Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI M22-0303 (Withdrawn 0307) - Withdrawn - Historical

Revision

Abstract

This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published in 1992; previously published March 2003.

 

NOTICE: This document was balloted and approved for withdrawal in 2007.

 

Dielectrically isolated (DI) wafers are used for fabricating specialized semiconductor devices, including radiation tolerant devices. This specification is inten­ded to aid the definition and procurement of such wafers.

　

Referenced SEMI Standards

SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers

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