SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers

Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at in February 2007. Originally published in 1992; previously published March 2003.


NOTICE: This document was balloted and approved for withdrawal in 2007.


Dielectrically isolated (DI) wafers are used for fabricating specialized semiconductor devices, including radiation tolerant devices. This specification is inten­ded to aid the definition and procurement of such wafers.


Referenced SEMI Standards

SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers

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