SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers
This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published in 1992; previously published March 2003.
NOTICE: This document was balloted and approved for withdrawal in 2007.
Dielectrically isolated (DI) wafers are used for fabricating specialized semiconductor devices, including radiation tolerant devices. This specification is intended to aid the definition and procurement of such wafers.
Referenced SEMI Standards
SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers