SEMI M23 - Specification for Polished Monocrystalline Indium Phosphide Wafers -

Abstract

This Specification covers the substrate requirements for monocrystalline high-purity indium phosphide wafers used in semiconductor and electronic device manufacturing. Dimensional and crystallographic orientation characteristics are the only standardized properties set forth below.

A complete purchase specification may require that additional physical, electrical, and bulk properties be defined. These properties are listed together with test methods suitable for determining their magnitude where such procedures are documented.

This Specification is directed specifically to indium phosphide wafers with one or both sides polished. Unpolished wafers or wafers with epitaxial films are not covered; however, purchasers of such wafers may find these specifications helpful in defining their requirements.

Subordinate Standards (included)

SEMI M23.1-0211 (Reapproved 0623) — Specification for Round 50 mm Diameter Polished Monocrystalline Indium Phosphide Wafers

SEMI M23.2-0211 (Reapproved 0623) — Specification for Round 3 inch (76.2 mm) Diameter Polished Monocrystalline Indium Phosphide Wafers

SEMI M23.3-0600 (Withdrawn 0811) — Specification for Rectangular Polished Monocrystalline Indium Phosphide Wafers

SEMI M23.4-0211 (Reapproved 0623) — Specification for Round 100 mm Polished Monocrystalline Indium Phosphide Wafers for Electronic and Optoelectronic Device Applications (Dove-Tail Type)

SEMI M23.5-0211 (Reapproved 0623) — Specification for Round 100 mm Polished Monocrystalline Indium Phosphide Wafers for Electronic and Optoelectronic Device Applications (V-Groove Option)

SEMI M23.6-0703 (Reapproved 0623) — Specification for Round 150 mm Polished Monocrystalline Indium Phosphide Wafers (Notched)

Referenced SEMI Standards (purchase separately)

SEMI M39 — Test Method for Measuring Resistivity and Hall Coefficient and Determining Hall Mobility on Semi-Insulating GaAs Single Crystals

SEMI M59 — Terminology of Silicon Technology

SEMI MF26 — Test Method for Determining the Orientation of a Semiconductive Single Crystal

SEMI MF42 — Test Method for Conductivity Type of Extrinsic Semiconducting Materials

SEMI MF84 — Test Method for Measuring Resistivity of Silicon Wafers with an In-Line Four-Point Probe

SEMI MF154 — Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces

SEMI MF523 — Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces

SEMI MF533 — Test Method for Thickness and Thickness Variation of Silicon Wafers

SEMI MF657 — Test Method for Measuring Warp and Total Thickness Variation on Silicon Wafers by Noncontact Scanning (Withdrawn 0914)

SEMI MF671 — Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials

SEMI MF673 — Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gauge

SEMI MF928 — Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates

SEMI MF1390 — Test Method for Measuring Bow and Warp on Silicon Wafers by Automated Noncontact Scanning

SEMI MF1392 — Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe

SEMI MF1393 — Test Method for Determining Net Carrier Density in Silicon Wafers by Miller Feedback Profiler Measurements with a Mercury Probe (Withdrawn 1105)

SEMI MF2074 — Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers

SEMI T5 — Specification for Alphanumeric Marking of Round Compound Semiconductor Wafers

Revision History

SEMI M23-0623 (technical revision)

SEMI M23-0811 (Reapproved 0218)

SEMI M23-0811 (technical revision)

SEMI M23-0211 (technical revision)

SEMI M23-0703 (designation update)

SEMI M23-0302 (technical revision)

SEMI M23-1000 (technical revision)

SEMI M23-0999 (technical revision)

SEMI M23-1296 (technical revision)

SEMI M23-93 (first published)

SEMI M23.1-0211 (Reapproved 0623)

SEMI M23.1-0211 (Reapproved 0218)

SEMI M23.1-0211 (technical revision)

SEMI M23.1-0600 (technical revision)

SEMI M23.1-93 (first published)

SEMI M23.2-0211 (Reapproved 0623)

SEMI M23.2-0211 (Reapproved 0218)

SEMI M23.2-0211 (technical revision)

SEMI M23.2-95 (first published)

SEMI M23.3-0600 (Withdrawn 0811)

SEMI M23.3-0600 SEMI M23.3-0600 (technical revision)

SEMI M23.3-95 (first published)

SEMI M23.4-0211 (Reapproved 0623)

SEMI M23.4-0211 (Reapproved 0218)

SEMI M23.4-0211 (technical revision)

SEMI M23.4-0999 (first published)

SEMI M23.5-0211 (Reapproved 0623)

SEMI M23.5-0211 (Reapproved 0218)

SEMI M23.5-0211 (technical revision)

SEMI M23.5-1000 (first published)

SEMI M23.6-0703 (Reapproved 0623)

SEMI M23.6-0703 (Reapproved 0218)

SEMI M23.6-0703 Reapproved 0211)

SEMI M23.6-0703 (first published)

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