SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers -
This guide was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www.semi.org February 2004; to be March 2004. Originally published in 1995; last published in 1996.
This document is a guide for box cleaning services, wafer suppliers, and wafer users for the re-use of 100, 125, 150 and 200 mm wafer shipping boxes. Its purpose is to reduce the total cost relating to transport of 100, 125, 150 and 200 mm wafers from the wafer supplier to the customers.
Referenced SEMI Standards
SEMI M31 — Provisional Mechanical Specification for Front-Opening Shipping Box Used to Transport And Ship 300 mm Wafers
SEMI M45 — Provisional Specification for 300 mm Shipping System
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