SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers -

Member Price: $130.00
Non-Member Price: $170.00

Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI M26-0304 (Reapproved 1110) - Inactive



This guide was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at February 2004; to be March 2004. Originally published in 1995; last published in 1996.


This document is a guide for box cleaning services, wafer suppliers, and wafer users for the re-use of 100, 125, 150 and 200 mm wafer shipping boxes. Its purpose is to reduce the total cost relating to transport of 100, 125, 150 and 200 mm wafers from the wafer supplier to the customers.


Referenced SEMI Standards

SEMI M31 — Provisional Mechanical Specification for Front-Opening Shipping Box Used to Transport And Ship 300 mm Wafers
SEMI M45 — Provisional Specification for 300 mm Shipping System

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.